PRECISION WORKHOLDING & FLUIDICS
Porous Ceramic Vacuum Chuck & Aerostatic Bearing Calculator
Calculate porous alumina / silicon carbide vacuum clamping force ($F_{\text{vac}}$), aerostatic air bearing lift capacity ($F_{\text{lift}}$), Darcy-Ergun gas permeability ($k$), and manifold seal ring vector offsets.
1. Media & Operating Conditions
Diameter of porous ceramic circular disc area (e.g. 200mm / 8-inch wafer).
Open volumetric void percentage in ceramic structure.
Nominal filtration rating (e.g. 15–30 µm for wafer chucks).
Vacuum level (e.g. 85 kPa vac) or Supply air pressure (e.g. 5.0 bar = 500 kPa).
Axial thickness of porous ceramic plate.
2. Clamping Force & Flow Results
Effective Clamping / Lift Force
2,670N
Hold Mass Equivalent
272.2kg
Darcy Permeability (k)
1.36e-13m²
Air Flow Rate (Q)
4.12L/min
Active Surface Area
314.2cm²
O-Ring Seal Groove OD
208.5mm
Prepress Guide: Review our Porous Ceramic Vacuum Chuck Prepress Guide for CNC manifold groove nesting, perimeter potting seals, and wafer stage DXF geometry.
Need Precision Vector Toolpaths for Vacuum Chuck Manifolds?
SpotItLive converts technical drawings into clean, closed vector DXF/SVG files with exact concentric distribution grooves, O-ring retaining glands, and CNC milling offsets.
Convert Vector on SpotItLive