Thin Film & Laser Deposition
PLD Target Raster & Plume Geometry Calculator
Calculate Archimedean spiral raster pitch, target erosion uniformity, and plume film thickness distribution for Pulsed Laser Deposition systems.
Process Parameters & Inputs
Diameter of rotating ceramic/metal ablation target.
Excimer / Nd:YAG laser firing frequency.
Continuous rotary chuck speed.
Distance $d_{ST}$ between ablation target and substrate.
Calculated CAM & Engineering Metrics
Archimedean Raster Pitch
0.85mm
Pulse Overlap Density
72.4%
Uniform Coating Radius (±5%)
18.2mm
Erosion Track Utilization
88.5%
Engineering Notes & Guidelines
PLD Target Scanning & Erosion Uniformity:
- Synchronizing continuous target rotation with programmable linear raster motion prevents stationary trenching (deep grooving) and eliminates particulate splashing.
- The film thickness follows the classical cosine distribution: $t(r) = t_0 (1 + r^2/d_{ST}^2)^{-(n+3)/2}$. Substrate planetary rotation is required for diameters exceeding $2 imes r_{ ext{uniform}}$.
- Ensure laser spot fluence ($J/ ext{cm}^2$) remains slightly above ablation threshold ($1.5 - 3.0 ext{ J/cm}^2$) to minimize sub-surface cone formation.
Looking for comprehensive CAM and preparation instructions?
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